CDA EVG Series manuali

Cda EVG Series Istruzioni per gli Interventi (370 pagine)

Marchio: Cda | Categoria: no | Dimensione: 15.40 MB |

Indice

520HE Users Manual

General Information

1 Note to the User

2 About this Manual

3 Recovery from Errors

Interlock List

Table of Contents

1 Interlock List

1.1 Leak Sensor

1.2 Water Flow Sensor

1.3 Over Temperature Sensor

Location:

1.4 EMO Button

2 Circuit Diagrams

Start Up and GUI

1 System Description

1.2 Safety

2 System Startup

Figure 4 - Overview Stations

De-embossing Station

30 of 370

EVG Explorer

1 Overview

1.1 Title Bar

1.2 Main Area

1.2.1 Application Groups

1.2.1.1 Maintenance Tools

1.2.2 Applications

1.2.2.2 Maintenance Tools

1.2.3.1 Login / Change User

1.2.3.2 Log Off

1.2.3.3 Shut Down

1.3 Task Bar

1.3.2 Running Applications

1.3.3 Date and Time

2 “EVG Remote Support” Tool

2.1 EVG TechSupport offline

2.2 EVG TechSupport online

2.3 Benefits

2.4 Requirements

3 “EVG Manual Copy” Tool

3.2 Open Manual

3.3 Troubleshooting

Start Up

1 Start Up

1.2 Initialize

1.3.1 Disconnected State

1.3.3 Ready State

1.3.4 Maintenance Mode

Figure 12 - Maintenance Mode

1.3.5 Executing State

1.3.6 Cleanup State

Figure 14 - Basic Layout

Status Information

Navigation Bar

2.1 Jobs

2.1.1 Overview Stations

2.1.1.1 Station Status

Figure 21 - Slot States

2.1.2 Overview Jobs

Figure 22 - Overview Jobs

2.2 Modules

2.3 Recipes

2.4 System

2.4.1 Overview

Figure 27 - System Frame

2.4.2 Safety Doors

2.4.3 Tooling Profiles

2.4.4 Facility Management

2.4.5 Tracking

2.5 Setup

Add User

Remove User

Properties

2.5.2 Light Tower Settings

3.1 Job Controls

3.2 Clean Up (optional)

3.3 Add Job

Jobs

Figure 38 - Add Job Window

3.4 Execute Job

4.1 Recipe Namespace

4.1.3 Delete Namespace

4.2 Recipe Overview

4.2.1 Select Namespace

4.2.2 Select Single Recipe

Figure 47 - Recipe Selection

Figure 48 - Common Task View

4.2.4 Select Version

Figure 50 - Common Task View

4.3 Create New Recipe

Figure 54 - Sample Recipe

100

EVG CIMFramework - Core

101

4.3.3 Recipe Commands

101

Figure 55 - Recipe Commands

101

4.3.4 Recipe Flow Diagram

101

4.3.5 Common Task View

102

4.4 Edit Recipe

104

4.4.3 Recipe Command Menu

105

2 bond modules:

106

4 cooling chucks:

106

10 buffer station slots:

106

4.4.3.4 Copy Recipe Command

107

4.4.4 Context Menu

108

4.4.5 Delete Recipe Command

109

4.4.6 Link Recipe Commands

109

4.5 Open Recipe

110

4.6 Save Recipe

111

4.7 Export Recipe

112

4.8 Delete Recipe

113

4.9 Recipe Validation

114

4.10 Recipe Linking

115

4.11 Recipe Code

116

5 Safety Doors

117

5.2 Open Safety Doors

118

5.3 Close Safety Doors

120

6 Analysis

121

6.2 DataValue State

122

6.3 Performance Tracking

123

124 of 370

124

6.4 Reports

125

7 Alarms

126

7.2 Alarm Situation

127

8.1 I/O Axis Field

128

9 Shut Down

129

Shut Down

130

History

131

EV Group Support:

132

Bond Module

133

Module Description

135

1 Module Description

136

1.2 Bond Module

137

138 of 370

138

1.3 Bond Chuck

139

1.4 Safety

140

Figure 7 - Cover Clamp

141

1.4.3 Facility Problems

142

2 Process Description

143

2.2 Anodic Wafer Bonding

145

2.3 Adhesive Wafer Bonding

146

2.4 Glass Frit Wafer Bonding

147

2.5 Eutectic Wafer Bonding

148

Process Description

149

150 of 370

150

3.1 Jobs

152

3.2 Modules

153

154 of 370

154

GUI

155

Figure 17 - Vacuum System

155

Designation

156

4 Recipe Programming

157

4.2 Recipes

158

Recipe Programming

159

Sequence Recipe Editor

159

4.2.1.1 Move Recipe Step

161

4.3 Recipe Steps

162

4.3.1 Heater

163

4.3.1.2 Wait Temperature

164

4.3.1.3 Preheat

165

4.3.1.4 Equalize

166

4.3.2 Vacuum System

167

4.3.2.2 Purge

168

4.3.2.3 Evacuate-Purge

169

4.3.2.4 Wait Pressure

170

4.3.3 General

172

4.3.3.3 Timer

173

4.3.3.4 Monitoring

174

4.3.4 Piston

175

4.3.4.3 Wait Force

176

4.3.5 Voltage

177

4.3.5.2 Wait Current

178

4.3.5.3 Wait Charge

179

4.3.5.4 Check Resistance

180

5 High Level Menu

181

5.1 Cover

183

5.2 Heater

184

5.3 Piston

185

5.4 Vacuum System

186

Figure 42

187

High Level Menu

187

5.4.3 Evacuate – Purge

187

Figure 41

187

5.5 High Voltage

188

5.6 Flags

189

5.7 Recorder

189

5.8 Wafer Bow

190

5.9 Resistance

191

6 Recorder Software

192

6.2 Choose Parameters

193

Recorder Software

195

6.3 Measure Bars

196

6.3.2 Move Measure Bar

197

6.3.3 Delete Measure Bar

197

6.4 Zoom

198

6.5.1 Grids

199

6.5.2 File Info

199

6.5.3 “Printing”

200

6.5.4 “About Recorder”

200

6.5.5 Save / Open

200

Maximum Piston Force

203

1 Maximum Piston Force

205

208 of 370

208

Note to the User

210

211

1 Note to the User

212

2 Safety

213

3 Daily Maintenance

214

3.2 Main Pressure

215

Daily Maintenance

216

3.3.1 Allowed Gases

217

218 of 370

218

3.4 Bond Tools

219

3.4.1 Bond Tool Insert

220

Figure 7

221

3.5 Flags

222

3.6 Clamping Feet

223

3.7 Clamping Force

224

3.7.2 Prepare Bondchuck

225

3.7.6 Measurement

227

3.7.7 Clamping Force

228

Figure 18 - Grub screw

229

Figure 19

229

Figure 20 - Clamping arm

229

Figure 21 - Top view

230

Figure 22 - Front view

231

Figure 18- Force Gauge

231

Measurement:

232

3.8 Clamping glasses

233

4 Weekly Maintenance

234

235

Weekly Maintenance

236

Parameters

237

Max. Pressure cannot be kept

238

Figure 24 - Hydraulic System

239

Figure 25

240

Figure 26

240

Figure 27

241

Figure 28

242

Figure 29

243

4.3.2.1 Schematics

244

With backpressure control

245

Function description

246

247

Components

249

Figure 35 - Top Cap

250

Figure 37 - Square Plate

251

Figure 38 - Piston Rod

251

Removing of obsolete parts

253

Figure 41 - Leak Line

254

Figure 42 - Separation Tank

254

255

Settings

256

257

Figure 46 - Apply Caliper

258

259

Figure 48 - Apply Caliper

260

Tech tips

261

Figure 50 - Load Cell

262

4.4 High Voltage

263

4.5 Cover Clamps

264

265

4.5.1 Working principle

266

4.6 Wafer Bow

267

269

271

4.6.1.3 CAN System

272

1 Coarse zero

273

(edge – zero)

273

2 Fine zero

273

4.7 Uniformity Check

274

Figure 59 - SI Wafer

275

4.7.2 Check Flatness

277

4.7.3 Heater Flatness

278

Figure 64 - Bottom Heater

279

4.7.4 Bond Tool Flatness

280

281

4.8 Flag Pulling Mechanism

282

4.8.1 Adjustment of Flags

283

4.8.1.2 Flag Orientation

284

4.9 Pressure Insert

285

286 of 370

286

Figure 78

287

Figure 79 - Clamp

288

Figure 80 - Fix disc

288

Figure 81

289

Figure 82

289

4.10 Cleaning

290

4.11.1 Pfeifer – THM07x

291

Figure 84 - Water System

293

Figure 85 - Water System

294

4.13.1 Reset procedure

295

5 Monthly Maintenance

296

5.3 Tool Detection

297

5.4 Piston Motion

298

5.5 Load Cell Test

298

Figure 93

299

Figure 95

300

301

Figure 99 - Remove screw

302

Figure 100

303

Figure 101

303

Monthly Maintenance

304

Figure 104

305

Mainswitch

307

5.7.3 Check EMO Button

308

5.8 Vacuum System

309

5.8.1 Maintenance Evacuate

310

5.8.2 Maintenance Purge

310

311 of 370

311

5.9 Safety Valve

312

5.10 Gauges

313

5.11 Roughing Pump

314

5.12 Cover Open/Close

314

5.13 Check of Sensors

315

Figure 118 - Leakage Sensors

316

5.14 Water filter

317

5.16 Water Flow

317

5.16.1 Adjust Water Flow

318

5.16.2 Chiller

318

5.17 Cooling Chucks

319

1 Cooling Bottom ON

320

2 Cooling Bottom

320

321 of 370

321

Figure 123

323

5.17.3 Cooling Time

324

325 of 370

325

327 of 370

327

329 of 370

329

330 of 370

330

5.19.1 Top Side

331

5.19.2 Bottom side

332

6 Quarterly Maintenance

333

6.2.2 Thermo Chuck

334

6.2.3 Maintenance Frequency

335

6.3 Adjust heater offset

336

337 of 370

337

6.4 TC Wafer Test

338

7 Annual Inspection

339

7.2 Cooling Lines

340

Figure 134 - Water System

341

Annual Inspection

342

343 of 370

343

8 Troubleshooting

344

345 of 370

345

8.3 Endvacuum not reached

346

8.4 No High Voltage

347

348 of 370

348

10 Lockout/Tagout

349

11 Facility Requirements

350

11.1 EVG520

351

EaseUS Todo Backup

354

1 General Information

356

1.3 Pre-OS

357

2 Create Backup

358

Figure 2 - System Backup

359

Figure 4 - Backup progress

360

2.3 Create a Bootable Media

361

Figure 7 - Building progress

362

3 How to Recover

363

3.1 Recover from Backup File

364

How to Recover

366

3.3 Recover using Pre-OS

367

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CDA EVG Series manuali

Cda EVG Series Istruzioni per gli Interventi (370 pagine)

Indice

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